Silicon wafer bonding technology 
edited by Subramanian S. Iyer and Andre J. Auberton-Herve� 
 - London  Institution of Electrical Engineers  c2002 
 - xxv, 149 p.  ill.  26 cm 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>852960395