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000 | 00857pam a2200277 4500 | ||
001 | mosti000000942 | ||
003 | MY-WpKST | ||
005 | 20210908065345.0 | ||
007 | OC | ||
008 | 131204s2013####nyuagr#001#0#eng#d | ||
020 | _a0849308267(alk.paper) | ||
035 | _a11076 | ||
039 |
_y201002000000 _zVLOAD |
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040 | _aMOSTI | ||
090 |
_a621.381512 _bMAD |
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100 |
_aMadou _hMarc J. |
||
245 | 1 | 0 |
_aFundamentals of microfabrication _cMarc J Madou |
260 |
_aBoca Raton _bCRC Press _c2002 |
||
300 |
_a723p _bill. (some col.) _c27cm |
||
504 | _aincludes index | ||
942 | _cBK | ||
999 |
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