| 000 | 00675nam a2200229Ia 4500 | ||
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| 000 | 00724pam a2200217 4500 | ||
| 001 | mosti000001688 | ||
| 003 | MY-WpKST | ||
| 005 | 20210908065405.0 | ||
| 007 | OC | ||
| 008 | 131204s2013####nyuagr#001#0#eng#d | ||
| 035 | _a10099 | ||
| 039 |
_y201002000000 _zVLOAD |
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| 040 | _aMOSTI | ||
| 090 | _a621.381 LAU | ||
| 100 |
_aLau _hChen Chen |
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| 245 | 1 | 0 |
_aCharacterization of amorphous silicon-carbon alloy films (a-Si:C:H) prepared by radio frequency (RF) Sputtering _cLau Chen Chen |
| 260 |
_aSkudai _bUniversiti Teknologi Malaysia _c2005 |
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| 300 |
_a113p _bil. _c31cm |
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| 504 | _aIncludes bibliographical references | ||
| 942 | _cBK | ||
| 999 |
_c11071 _d11071 |
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