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plasma techniques for film desposition mitsuharu kanuma

By: Material type: TextTextPublication details: berlin springer-vertag 2005Description: ix,224p ill. 24cmISBN:
  • 184265151X
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Item type Current library Collection Call number Status Date due Barcode
Book Book MOSTI Library Open shelf Open Collection 621.38152 KON (Browse shelf(Opens below)) Available 012530

includes bibliographical references (p. 216-220) and index

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