plasma techniques for film desposition mitsuharu kanuma
Material type: TextPublication details: berlin springer-vertag 2005Description: ix,224p ill. 24cmISBN:- 184265151X
Item type | Current library | Collection | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Book | MOSTI Library Open shelf | Open Collection | 621.38152 KON (Browse shelf(Opens below)) | Available | 012530 |
includes bibliographical references (p. 216-220) and index
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