plasma techniques for film desposition mitsuharu kanuma

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Material type: Text

TextPublication details: berlin springer-vertag 2005Description: ix,224p ill. 24cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Book	MOSTI Library Open shelf	Open Collection	621.38152 KON (Browse shelf(Opens below))	Available		012530

includes bibliographical references (p. 216-220) and index

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