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plasma techniques for film desposition mitsuharu kanuma
Material type:
TextPublication details: berlin springer-vertag 2005Description: ix,224p ill. 24cmISBN: - 184265151X
| Item type | Current library | Collection | Call number | Status | Date due | Barcode |
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MOSTI Library Open shelf | Open Collection | 621.38152 KON (Browse shelf(Opens below)) | Available | 012530 |
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| 621.38152 ASI Solid state ionic materials | 621.38152 BUS Business briefing | 621.38152 GAA GaAs electronic materials and devices | 621.38152 KON plasma techniques for film desposition | 621.38152 MED Medium and long term industrial master plan Malaysia. Vol. II, part 8 | 621.38152 MED Medium and long term industrial master plan, Malaysia, 1986- 1995 | 621.38152 OVE Overview of the semiconductor industry |
includes bibliographical references (p. 216-220) and index
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